Real-time detection of surface cracks on silicon wafers during laser beam irradiation
http://link.springer.com/article/10.1007/s12206-014-1206-z#page-1
Real-time detection of surface cracks on silicon wafers during laser beam irradiation
Abstract
In this paper, a real-time in situ method to detect surface crack initiation on silicon wafers during laser beam irradiation is proposed. This method collects scattered light from the silicon wafer surface subjected to the laser irradiation. When the crack is initiated, the laser beam is strongly scattered by the crack so that the proposed method can monitor the time of crack initiation based on the increases of the level of the scattering signal. In order to demonstrate the performance of this method, a silicon wafer specimen was illuminated by a continuous wave (CW) fiber laser beam (wavelength of 1,070 nm) and the scattered light was detected at three different laser powers. The scattering signal showed a very high level at the time of crack initiation. The detected crack initiation times were 11.6 s, 5.5 s, and 2.5 s at irradiances of 130 W/cm2, 149 W/cm2, and 168 W/cm2, respectively. These results agree well with the theoretical predictions. Based on these results, we demonstrated that the proposed method is very effective for the real-time in situ detection of surface cracking induced by laser beam irradiation on silicon wafers.
-
Full-range stress–strain curve estimation of aluminum alloys using machine learning-aided ultrasound
-
Nondestructive Inspection of Directed Energy Deposited Components Using Scanning Acoustic Microscopy with Metalworking Fluids
-
Nondestructive Inspection of Cylindrical Components Repaired Via Directed Energy Deposition Using Scanning Acoustic Microscopy with Metal Lubricants
-
Plastic properties estimation of aluminum alloys using machine learning of ultrasonic and eddy current data
-
Calibration method using a narrowband signal for measurement of the acoustic nonlinearity parameter
-
2022.11 한국비파괴검사학회 2022 추계학술대회 우수논문발표상 (유지웅, 송동기, 장경영)
-
2021.12 한국비파괴검사학회 2021 추계학술대회 우수논문발표상 (한희진, 장경영)
-
2021.12 한국비파괴검사학회 2021 추계학술대회 우수논문발표상 (방성준, 송동기, 장경영)
-
Comparisons of second- and third-order ultrasonic nonlinearity parameters measured using through-transmission and pulse-echo methods
-
IJPEM-GT 저널지 편집장 우수논문 선정 (박성현)
-
2022 산업과학연구소 우수논문상 (박성현)
-
In-situ and Layer-by-layer Grain Size Estimation of Additively Manufactured Metal Components using Femtosecond Laser Ultrasonic Technique (Submitted)
-
Microstructural Characterization of Additively Manufactured Metal Components Using Linear and Nonlinear Ultrasonic Techniques
-
Tensile properties evaluation of additively manufactured Ti-6Al-4V/yttria-stabilized zirconia composite using absolute nonlinear-ultrasonic technique (Submitted)
-
Generation and Measurement of Gigahertz Ultrasonic Waves in Additively Manufactured Thin Metal Components using Femtosecond Laser and Application to In-situ Grain size Monitoring (Submitted)
-
Porosity evaluation of additive manufactured parts: ultrasonic testing and eddy current testing
-
Nondestructive evaluation of micro-oxide inclusions in additively manufactured metal parts using nonlinear ultrasonic technique
-
Mechanical properties estimation of additively manufactured metal components using femtosecond laser ultrasonics and laser polishing
-
Experimental Verification of Contact Acoustic Nonlinearity at Rough Contact Interfaces
-
Compensation of a Second Harmonic Wave Included in an Incident Ultrasonic Wave for the Precise Measurement of the Acoustic Nonlinearity Parameter
-
Measurement of Absolute Acoustic Nonlinearity Parameter Using Laser-Ultrasonic Detection
-
Rapid Molecular Diagnostic Sensor Based on Ball-Lensed Optical Fibers
-
Porosity Evaluation of Additively Manufactured Components Using Deep Learning‑based Ultrasonic Nondestructive Testing (Editor's pick)
-
Deep Learning-Based Ultrasonic Testing to Evaluate the Porosity of Additively Manufactured Parts with Rough Surfaces
-
Analysis of the influence of surface roughness on measurement of ultrasonic nonlinearity parameter using contact-type transducer
-
Indirect Method for Measuring Absolute Acoustic Nonlinearity Parameter Using Surface Acoustic Waves with a Fully Non-Contact Laser-Ultrasonic Technique
-
Evaluation of yield strength by ultrasonic reconstruction of quadratic nonlinear Stress-Strain curve
-
Ultrasonic nonlinearity parameter in uniaxial stress condition
-
Applicability of nonlinear ultrasonic technique to evaluation of thermally aged CF8M cast stainless steel
-
2021.07 한국비파괴검사학회 2021 춘계학술대회 우수논문발표상 (유지웅, 송동기, 장경영)
-
2021.07 한국비파괴검사학회 2021 춘계학술대회 우수논문발표상 (송동기, 장경영)
-
2020.06 한국비파괴검사학회 비파괴검사학회지 우수논문상 / 2020.07 한국과학기술단체총연합회 과학기술우수논문상 (최성호,김상민,장경영)
-
2019.11 한국비파괴검사학회 2019 추계학술대회 우수논문발표상 (박성현, 홍정연, 최성호, 장경영)
-
2019.07 한국비파괴검사학회 2019 춘계학술대회 우수논문발표상 (송동기, 류주영, 홍정연, 최성호, 장경영)
-
2019.07 한국비파괴검사학회 2019 춘계학술대회 우수논문발표상 (박성현, 심명종, 최성호, 장경영)
-
Nondestructive Evaluation of Thermal Aging in Al6061 Alloy by measuring Acoustic Nonlinearity of Laser-generated Surface Acoustic Waves
-
Stress estimation using the acoustoelastic effect of surface waves in weak anisotropic materials
-
Comparison of Linear and Nonlinear Ultrasonic Parameters in Characterizing Grain Size and Mechanical Properties of 304L Stainless Steel
-
Imaging and Sizing of Surface Defects Using Synthetic Aperture Focusing of Laser-generated Surface Waves
-
2018 산업통상자원부장관 위촉장
-
2018.11 비파괴학회 우수포스터상 (이영진,박기태,김종범,김창수,장경영)
-
2018.11 비파괴학회 우수논문발표상 (김창수,김종범,송동기,장경영)
-
Internal defect detection using laser-generated longitudinal waves in ablation regime
-
Synthetic aperture imaging of contact acoustic nonlinearity to visualize the closing interfaces using tone-burst ultrasonic waves
-
Variation of Acoustoelastic Effect in Al6061-T6 according to Heat Treatment Time
-
Dependence of Nonlinear Ultrasonic Characteristic on Second-Phase Precipitation in Heat-Treated Al 6061-T6 alloy
-
Relative Measurement of the Acoustic Nonlinearity Parameter using Laser Detection of an Ultrasonic Wave
-
A Method to Estimate the Absolute Ultrasonic Nonlinearity Parameter from Relative Measurements
-
Finite element analysis of a low-velocity impact test for glass fiber-reinforced polypropylene composites considering mixed-mode interlaminar fracture toughness
-
2017년 비파괴검사학회지 우수논문발표상 (하홍필, 김종범, 장경영)
-
2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (박사과정)
-
2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)
-
2016년 비파괴검사학회지 우수논문발표상 (박성현, 김종범, 이주호, 장경영)
-
Assessment of Thermal Degradation by Cumulative Variation of Ultrasonic Nonlinear Parameter
-
Assessment of Thermal Aging of Aluminum Alloys by Acoustic Nonlinearity Measurement of Surface Acoustic Waves
-
Absolute Measurement and Relative Measurement of Ultrasonic Nonlinear Parameter
-
Experimental Comparison of Nonlinear Parameters Obtained from Absolute Measurement and Relative Measurement
-
Comparison of Ultrasonic Nonlinear Parameters Measured by PZT and LiNbO3 Transducers
-
KSME-SEMES 오픈 이노베이션 챌린지 동상 수상 - 윤성희
-
2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (석박사통합과정)
-
2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)
-
JMST - JMST Contribution Award
-
Nanotribological and wetting performance of hierarchical patterns
-
2015 산업부장관 표창
-
Demonstration of Disturbance Propagation and Amplification in Car-Following Situation for Enhancement of Vehicle Platoon System
-
Relative Measurement of Acoustic Nonlinear Parameters and Comparison of Sensitivity to Thermal Aging
-
Non-contact Measurement of Elastic Modulus by using Laser Ultrasonic
-
Relationship between Second- and Third-order Acoustic Nonlinear Parameters in Relative Measurement
-
Non-Contact Evaluation of Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy
-
Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime
-
Real-time detection of surface cracks on silicon wafers during laser beam irradiation
-
High power CW laser-induced damage of CMOS image sensor
-
Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver
-
Study on the Nonlinear Electromagnetic Acoustic Resonance Method for the Evaluation of Hidden Damage in a Metallic Material
-
Influence of laser beam profiles on the frequency bandwidth of laser-generated surface acoustic waves
-
Laser ultrasonic inspection in ablation regime
-
Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique
-
대한기계학회 - 우수 학생 논문상
-
비파괴검사학회지 - 우수논문상
-
한국도로공사 교통데이터 공모전 - 대한교통학회 회장상 수상 (김진수)
-
In-Line Ultrasonic Monitoring for Sediments Stuck on Inner Wall of a Polyvinyl Chloride Pipe
-
In situ detection of laser-induced slip initiation on the silicon wafer surface
-
Initiation time of near-infrared laser-induced slip on the surface of silicon wafers
-
Evaluation of Ultrasonic Nonlinear Characteristics in Artificially Aged Al6061-T6
-
Simulations for Internal Defect Inspection using Laser Generated Ultrasonic Wave in Ablation Regime
-
Slip damage of silicon wafers subjected to continuous infrared laser irradiation
-
Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
-
Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique
-
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile Models
-
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy
-
A6061 합금의 석출경화 열처리에 따른 탄성파의 음향 특성 연구
-
비파괴검사학회지 - 우수 논문상
-
한국ITS학회 - 우수논문상
-
Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave
-
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy (Al-Mg-Si-Cu)
-
Application of Macrofiber Composite for Smart Transducer of Lamb Wave Inspection
-
Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam
-
Imaging of contact acoustic nonlinearity using synthetic aperture technique
-
Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique
-
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile
