In situ detection of laser-induced slip initiation on the silicon wafer surface
http://www.ncbi.nlm.nih.gov/pubmed/25121706
In situ detection of laser-induced slip initiation on the silicon wafer surface.
Abstract
We propose a real-time in situ method to detect slip initiation on the surface of silicon wafers during high-power laser beam irradiation. In this method, light is collected from the surface of a silicon wafer subjected to laser irradiation. When the slip is initiated, it strongly scatters the laser beam, allowing detection of the time of the slip initiation based on the resulting sudden increase in the scattering signal. To demonstrate the performance of this method, a silicon wafer specimen was illuminated by a near-infrared continuous-wave fiber laser beam (of wavelength 1070 nm) at four different laser powers, and the scattered light was detected. The scattering signal increased suddenly at the time of slip initiation. To confirm the occurrence of slip, the surface morphologies of the silicon specimens after laser irradiation were analyzed using an optical microscope; surface slips were observed only in the specimens for which the sudden increase in scattering had been detected. Thus, the proposed method is shown to be very effective for the real-time in situ detection of surface slip initiation induced by high-power laser beam irradiation on silicon wafers.
-
Porosity evaluation of additive manufactured parts: ultrasonic testing and eddy current testing
Date2021.08.25 CategoryDomestic Views124223 -
Imaging and Sizing of Surface Defects Using Synthetic Aperture Focusing of Laser-generated Surface Waves
Date2020.01.06 CategoryDomestic Views34924 -
Variation of Acoustoelastic Effect in Al6061-T6 according to Heat Treatment Time
Date2018.11.28 CategoryDomestic Views62396 -
High power CW laser-induced damage of CMOS image sensor
Date2015.09.16 CategoryDomestic Views97764 -
Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver
Date2015.09.16 CategoryDomestic Views96827 -
Study on the Nonlinear Electromagnetic Acoustic Resonance Method for the Evaluation of Hidden Damage in a Metallic Material
Date2015.09.16 CategoryDomestic Views95814 -
Evaluation of Ultrasonic Nonlinear Characteristics in Artificially Aged Al6061-T6
Date2014.09.29 CategoryDomestic Views121850 -
Simulations for Internal Defect Inspection using Laser Generated Ultrasonic Wave in Ablation Regime
Date2014.09.29 CategoryDomestic Views128154 -
Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique
Date2014.09.29 CategoryDomestic Views222611 -
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile Models
Date2014.09.29 CategoryDomestic Views125706 -
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy
Date2014.09.29 CategoryDomestic Views118649 -
A6061 합금의 석출경화 열처리에 따른 탄성파의 음향 특성 연구
Date2014.09.29 CategoryDomestic Views124342 -
Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam
Date2014.03.05 CategoryDomestic Views104319 -
Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique
Date2014.03.05 CategoryDomestic Views111642 -
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile
Date2014.03.05 CategoryDomestic Views132249 -
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy
Date2014.03.05 CategoryDomestic Views116358 -
Fully Non-Contact Assessment of Acoustic Nonlinearity According to Plastic Deformation in Al6061 Alloy
Date2014.03.05 CategoryDomestic Views135348 -
Imaging of Harmonic Wave Generated by Contact Acoustic Nonlinearity in Obliquely Incident Ultrasonic Wave
Date2014.03.05 CategoryDomestic Views191558 -
Frequency Characteristics of Surface Wave Generated by Single-Line Pulsed Laser Beam with Two Kinds of Spatial Energy Profile Models: Gaussian and Square-Like
Date2014.03.05 CategoryDomestic Views108358 -
레이저 여기표면파의 음향비선형성을 이용한 Al6061 합금의 소성변형평가
Date2012.05.03 CategoryDomestic Views116437