Slip damage of silicon wafers subjected to continuous infrared laser irradiation
http://www.sciencedirect.com/science/article/pii/S1567173914001072
Volume 14, Issue 6, June 2014, Pages 843–849
Slip damage of silicon wafers subjected to continuous infrared laser irradiation
Highlights
- •
We investigate the laser irradiance inducing slip damage in a silicon wafer.
- •
We develop a simulation model to predict the slip damage.
- •
The model calculates the resolved shear stress and the temperature.
- •
The slipping irradiance predicted by simulation agrees well with the experiments.
Abstract
Laser irradiation can cause damage to solids, such as slipping, cracking, melting, and ablation. Silicon crystals are brittle, so slipping is a serious problem because it can easily result in fracture. This study investigates the amount of continuous near-infrared (NIR) laser irradiance that induces slip damage in a single-crystal silicon wafer. For this purpose we developed a simulation model based on heat transfer and thermo-elastic analyses. To verify the simulation model, silicon wafer specimens were irradiated by a fiber laser beam (of wavelength 1065 nm), and the surface morphology after laser beam irradiation was inspected using optical microscopy (OM). The irradiation time was fixed at 10 s, and nine different irradiances from 180 W/cm2 to 380 W/cm2 were tested in steps of 25 W/cm2. No slip surface was found after exposure to the irradiances up to 230 W/cm2, but straight slips in the <110> direction appeared at the irradiances of 255 W/cm2 and above. These experimental findings agreed well with the simulation.
Keywords
- Infrared laser;
- Silicon wafer;
- Thermal stress;
- Slip damage
-
Full-range stress–strain curve estimation of aluminum alloys using machine learning-aided ultrasound
Date2024.03.19 CategoryInternational Views35 -
Nondestructive Inspection of Directed Energy Deposited Components Using Scanning Acoustic Microscopy with Metalworking Fluids
Date2024.03.19 CategoryInternational Views31 -
Nondestructive Inspection of Cylindrical Components Repaired Via Directed Energy Deposition Using Scanning Acoustic Microscopy with Metal Lubricants
Date2024.03.19 CategoryInternational Views190 -
Plastic properties estimation of aluminum alloys using machine learning of ultrasonic and eddy current data
Date2024.03.19 CategoryInternational Views66 -
Calibration method using a narrowband signal for measurement of the acoustic nonlinearity parameter
Date2024.03.19 CategoryInternational Views30 -
Comparisons of second- and third-order ultrasonic nonlinearity parameters measured using through-transmission and pulse-echo methods
Date2022.11.15 CategoryInternational Views2467 -
In-situ and Layer-by-layer Grain Size Estimation of Additively Manufactured Metal Components using Femtosecond Laser Ultrasonic Technique (Submitted)
Date2022.02.21 CategoryInternational Views953 -
Microstructural Characterization of Additively Manufactured Metal Components Using Linear and Nonlinear Ultrasonic Techniques
Date2022.02.21 CategoryInternational Views1273 -
Tensile properties evaluation of additively manufactured Ti-6Al-4V/yttria-stabilized zirconia composite using absolute nonlinear-ultrasonic technique (Submitted)
Date2022.02.21 CategoryInternational Views12461 -
Generation and Measurement of Gigahertz Ultrasonic Waves in Additively Manufactured Thin Metal Components using Femtosecond Laser and Application to In-situ Grain size Monitoring (Submitted)
Date2022.02.21 CategoryInternational Views26200 -
Porosity evaluation of additive manufactured parts: ultrasonic testing and eddy current testing
Date2021.08.25 CategoryDomestic Views124171 -
Nondestructive evaluation of micro-oxide inclusions in additively manufactured metal parts using nonlinear ultrasonic technique
Date2021.08.25 CategoryInternational Views20084 -
Mechanical properties estimation of additively manufactured metal components using femtosecond laser ultrasonics and laser polishing
Date2021.08.25 CategoryInternational Views28927 -
Experimental Verification of Contact Acoustic Nonlinearity at Rough Contact Interfaces
Date2021.08.25 CategoryInternational Views49940 -
Compensation of a Second Harmonic Wave Included in an Incident Ultrasonic Wave for the Precise Measurement of the Acoustic Nonlinearity Parameter
Date2021.08.25 CategoryInternational Views45557 -
Measurement of Absolute Acoustic Nonlinearity Parameter Using Laser-Ultrasonic Detection
Date2021.08.25 CategoryInternational Views43181 -
Rapid Molecular Diagnostic Sensor Based on Ball-Lensed Optical Fibers
Date2021.08.25 CategoryInternational Views36390 -
Porosity Evaluation of Additively Manufactured Components Using Deep Learning‑based Ultrasonic Nondestructive Testing (Editor's pick)
Date2021.08.25 CategoryInternational Views12109 -
Deep Learning-Based Ultrasonic Testing to Evaluate the Porosity of Additively Manufactured Parts with Rough Surfaces
Date2021.08.25 CategoryInternational Views21456 -
Analysis of the influence of surface roughness on measurement of ultrasonic nonlinearity parameter using contact-type transducer
Date2021.08.25 CategoryInternational Views505405