International
2014.09.29 13:43
Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
댓글 0조회 수 637709추천 수 0
http://opticalengineering.spiedigitallibrary.org/article.aspx?articleid=1813918
Materials, Photonic Devices, And Sensors
Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
Opt. Eng. 53(1), 017103 (Jan 10, 2014). doi:10.1117/1.OE.53.1.017103
History: Received September 6, 2013; Revised November 13, 2013; AcceptedDecember 16, 2013
Abstract. Laser-induced thermal damages of a silicon wafer surface subjected to continuous near-infrared laser irradiation were investigated. Silicon wafer specimens were illuminated by a continuous-wave fiber laser beam (1070-nm wavelength) with irradiances from 93 to 186 W/cm2 , and the surface morphology of each specimen was analyzed using optical microscopy. With increasing irradiance, straight cracks in the <110> direction appeared first, and partial melting and complete melting were subsequently observed. The mechanism of these laser-induced thermal damages in the silicon wafer surface was discussed with numerical analysis based on the heat transfer and thermoelasticity model. The irradiances initiating the cracking and melting were predicted by determining the irradiances in which the calculated thermal stress and temperature exceeded the corresponding limits of the fracture strength and melting point, respectively. These predictions agreed well with the experimental findings. Laser-induced thermal damages of the silicon wafer surface subjected to a continuous near-infrared laser irradiation were identified based on these investigations.
-
Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
Date2014.09.29 CategoryInternational Views637709 -
Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique
Date2014.09.29 CategoryDomestic Views222540 -
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile Models
Date2014.09.29 CategoryDomestic Views125704 -
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy
Date2014.09.29 CategoryDomestic Views118648 -
A6061 합금의 석출경화 열처리에 따른 탄성파의 음향 특성 연구
Date2014.09.29 CategoryDomestic Views124331 -
Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave
Date2014.03.05 CategoryInternational Views139342 -
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy (Al-Mg-Si-Cu)
Date2014.03.05 CategoryInternational Views191756 -
Application of Macrofiber Composite for Smart Transducer of Lamb Wave Inspection
Date2014.03.05 CategoryInternational Views106249 -
Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam
Date2014.03.05 CategoryDomestic Views104315 -
Imaging of contact acoustic nonlinearity using synthetic aperture technique
Date2014.03.05 CategoryInternational Views120786 -
Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique
Date2014.03.05 CategoryDomestic Views111640 -
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile
Date2014.03.05 CategoryDomestic Views132152 -
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy
Date2014.03.05 CategoryDomestic Views116357 -
Influence of slit width on harmonic generation in ultrasonic surface waves excited by masking a laser beam with a line arrayed slit
Date2014.03.05 CategoryInternational Views127877 -
Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy
Date2014.03.05 CategoryInternational Views121065 -
Analysis of Transmitted Ultrasound signals through Apples at Different Storage Times using the Continuous Wavelet Transformation
Date2014.03.05 CategoryInternational Views107089 -
Fully Non-Contact Assessment of Acoustic Nonlinearity According to Plastic Deformation in Al6061 Alloy
Date2014.03.05 CategoryDomestic Views135339 -
Imaging of Harmonic Wave Generated by Contact Acoustic Nonlinearity in Obliquely Incident Ultrasonic Wave
Date2014.03.05 CategoryDomestic Views191464 -
Frequency Characteristics of Surface Wave Generated by Single-Line Pulsed Laser Beam with Two Kinds of Spatial Energy Profile Models: Gaussian and Square-Like
Date2014.03.05 CategoryDomestic Views108358 -
Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces
Date2014.03.05 CategoryInternational Views95401