Initiation time of near-infrared laser-induced slip on the surface of silicon wafers
http://scitation.aip.org/content/aip/journal/apl/104/25/10.1063/1.4885385
F
ABSTRACT
We have determined the initiation time of laser-induced slip on a silicon wafer surface subjected to a near-infrared continuous-wave laser by numerical simulations and experiments. First, numerical analysis was performed based on the heat transfer and thermoelasticity model to calculate the resolved shear stress and the temperature-dependent yield stress. Slip initiation time was predicted by finding the time at which the resolved shear stress reached the yield stress.Experimentally, the slip initiation time was measured by using a laser scattering technique that collects scattered light from the silicon wafer surface and detects strong scattering when thesurface slip is initiated. The surface morphology of the silicon wafer surface after laser irradiationwas also observed using an optical microscope to confirm the occurrence of slip. The measuredslip initiation times agreed well with the numerical predictions.
-
Laser ultrasonic inspection in ablation regime
-
Internal defect detection using laser-generated longitudinal waves in ablation regime
-
Initiation time of near-infrared laser-induced slip on the surface of silicon wafers
-
Influence of slit width on harmonic generation in ultrasonic surface waves excited by masking a laser beam with a line arrayed slit
-
Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime
-
Influence of laser beam profiles on the frequency bandwidth of laser-generated surface acoustic waves
-
Indirect Method for Measuring Absolute Acoustic Nonlinearity Parameter Using Surface Acoustic Waves with a Fully Non-Contact Laser-Ultrasonic Technique
-
In-situ and Layer-by-layer Grain Size Estimation of Additively Manufactured Metal Components using Femtosecond Laser Ultrasonic Technique (Submitted)
-
In-Line Ultrasonic Monitoring for Sediments Stuck on Inner Wall of a Polyvinyl Chloride Pipe
-
In situ detection of laser-induced slip initiation on the silicon wafer surface
-
Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique
-
Imaging of Defects in Thin Plate by Scanning of Laser-generated Focused-Lamb Waves
-
Imaging of contact acoustic nonlinearity using synthetic aperture technique
-
Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces
-
Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces
-
GENERATION OF WAVELENGTH-MATCHED GUIDED WAVE IN TUBE BY ARRAYED LASER BEAM METHOD
-
Generation and Measurement of Gigahertz Ultrasonic Waves in Additively Manufactured Thin Metal Components using Femtosecond Laser and Application to In-situ Grain size Monitoring (Submitted)
-
Full-range stress–strain curve estimation of aluminum alloys using machine learning-aided ultrasound
-
Frequency Response of Narrowband Surface Waves Generated by Laser Beams Spatially Modulated with a Line-arrayed Slit Mask
-
Finite element analysis of a low-velocity impact test for glass fiber-reinforced polypropylene composites considering mixed-mode interlaminar fracture toughness