Initiation time of near-infrared laser-induced slip on the surface of silicon wafers
http://scitation.aip.org/content/aip/journal/apl/104/25/10.1063/1.4885385
F
ABSTRACT
We have determined the initiation time of laser-induced slip on a silicon wafer surface subjected to a near-infrared continuous-wave laser by numerical simulations and experiments. First, numerical analysis was performed based on the heat transfer and thermoelasticity model to calculate the resolved shear stress and the temperature-dependent yield stress. Slip initiation time was predicted by finding the time at which the resolved shear stress reached the yield stress.Experimentally, the slip initiation time was measured by using a laser scattering technique that collects scattered light from the silicon wafer surface and detects strong scattering when thesurface slip is initiated. The surface morphology of the silicon wafer surface after laser irradiationwas also observed using an optical microscope to confirm the occurrence of slip. The measuredslip initiation times agreed well with the numerical predictions.
-
Non-contact Single-Mode Guided Wave Technique by the Combination of Wavelength-Matched Laser Generation and Angle-Matched Leak Wave Detection
Date2012.05.03 CategoryInternational Views183063 -
Non-contact Measurement of Elastic Modulus by using Laser Ultrasonic
Date2015.09.16 CategoryInternational Views232624 -
Non-Contact Evaluation of Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy
Date2015.09.16 CategoryInternational Views160155 -
NDE of low-velocity impact damages in composite laminates using ESPI, digital shearography and ultrasound C-scan techniques
Date2014.03.05 CategoryInternational Views96598 -
Nanotribological and wetting performance of hierarchical patterns
Date2016.02.23 CategoryInternational Views123497 -
Microstructural Characterization of Additively Manufactured Metal Components Using Linear and Nonlinear Ultrasonic Techniques
Date2022.02.21 CategoryInternational Views1273 -
Mechanical properties estimation of additively manufactured metal components using femtosecond laser ultrasonics and laser polishing
Date2021.08.25 CategoryInternational Views28949 -
Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver
Date2015.09.16 CategoryDomestic Views96827 -
Measurement of Absolute Acoustic Nonlinearity Parameter Using Laser-Ultrasonic Detection
Date2021.08.25 CategoryInternational Views43318 -
Long-Term Aging Diagnosis of Rotor Steel Using Acoustic Nonlinearity
Date2012.05.03 CategoryDomestic Views108703 -
Laser ultrasonic inspection in ablation regime
Date2015.09.16 CategoryInternational Views132389 -
Internal defect detection using laser-generated longitudinal waves in ablation regime
Date2018.11.29 CategoryInternational Views108892 -
Initiation time of near-infrared laser-induced slip on the surface of silicon wafers
Date2014.09.29 CategoryInternational Views112391 -
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile Models
Date2014.09.29 CategoryDomestic Views125711 -
Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile
Date2014.03.05 CategoryDomestic Views132336 -
Influence of slit width on harmonic generation in ultrasonic surface waves excited by masking a laser beam with a line arrayed slit
Date2014.03.05 CategoryInternational Views127882 -
Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime
Date2015.09.16 CategoryInternational Views282486 -
Influence of laser beam profiles on the frequency bandwidth of laser-generated surface acoustic waves
Date2015.09.16 CategoryInternational Views121913 -
Indirect Method for Measuring Absolute Acoustic Nonlinearity Parameter Using Surface Acoustic Waves with a Fully Non-Contact Laser-Ultrasonic Technique
Date2021.08.25 CategoryInternational Views31732 -
In-situ and Layer-by-layer Grain Size Estimation of Additively Manufactured Metal Components using Femtosecond Laser Ultrasonic Technique (Submitted)
Date2022.02.21 CategoryInternational Views953