In situ detection of laser-induced slip initiation on the silicon wafer surface
http://www.ncbi.nlm.nih.gov/pubmed/25121706
In situ detection of laser-induced slip initiation on the silicon wafer surface.
Abstract
We propose a real-time in situ method to detect slip initiation on the surface of silicon wafers during high-power laser beam irradiation. In this method, light is collected from the surface of a silicon wafer subjected to laser irradiation. When the slip is initiated, it strongly scatters the laser beam, allowing detection of the time of the slip initiation based on the resulting sudden increase in the scattering signal. To demonstrate the performance of this method, a silicon wafer specimen was illuminated by a near-infrared continuous-wave fiber laser beam (of wavelength 1070 nm) at four different laser powers, and the scattered light was detected. The scattering signal increased suddenly at the time of slip initiation. To confirm the occurrence of slip, the surface morphologies of the silicon specimens after laser irradiation were analyzed using an optical microscope; surface slips were observed only in the specimens for which the sudden increase in scattering had been detected. Thus, the proposed method is shown to be very effective for the real-time in situ detection of surface slip initiation induced by high-power laser beam irradiation on silicon wafers.
-
마이켈슨 간섭계를 이용한 레이저 여기 초음파의 검출
Date2012.05.03 CategoryDomestic Views110266 -
초음파 가스 유량계 개발과 활용
Date2012.05.03 CategoryDomestic Views110210 -
판재의 초음파 비선형 특성평가를 위한 Lamb Wave 기법
Date2012.05.03 CategoryDomestic Views109919 -
"Evaluation of Fracture Toughness Degradation of CrMoV Rotor Steels based on Ultrasonic Nonlinearity Measurements"
Date2012.05.03 CategoryDomestic Views109780 -
Ultrasonic Estimation of Clamping Force in High-Tension Bolts
Date2012.05.03 CategoryInternational Views109688 -
Wetting behavior and nanotribological properties of silicon nanopatterns combined with diamond-like carbon and perfluoropolyther films
Date2012.05.03 CategoryInternational Views109677 -
SUS316L 강의 초음파 비선형 특성평가를 위한 경사입사기법
Date2012.05.03 CategoryDomestic Views109389 -
Internal defect detection using laser-generated longitudinal waves in ablation regime
Date2018.11.29 CategoryInternational Views108915 -
초음파의 비선형 특성을 이용한 미세균열 평가
Date2012.05.03 CategoryDomestic Views108827 -
Long-Term Aging Diagnosis of Rotor Steel Using Acoustic Nonlinearity
Date2012.05.03 CategoryDomestic Views108703 -
초음파를 이용한 반도체의 신뢰성 평가
Date2012.05.03 CategoryDomestic Views108663 -
표면파의 음향 비선형성과 실험적 특성 검증
Date2012.05.03 CategoryDomestic Views108513 -
Frequency Characteristics of Surface Wave Generated by Single-Line Pulsed Laser Beam with Two Kinds of Spatial Energy Profile Models: Gaussian and Square-Like
Date2014.03.05 CategoryDomestic Views108361 -
"Laser Generation of Focused Lamb Wave"
Date2012.05.03 CategoryDomestic Views108257 -
A lane-curve detection based on an LCF
Date2012.05.03 CategoryInternational Views108054 -
Failure Analysis and Evalutaion of Strength Properties for Brazed Joints
Date2012.05.03 CategoryInternational Views107878 -
초음파 가스 유량계 개발 연구
Date2012.05.03 CategoryDomestic Views107721 -
Cu와 Cu-Zn 합금의 저주기피로 동안 발달한 미세조직 평가를 위한 비파괴기술
Date2012.05.03 CategoryDomestic Views107716 -
고체-고체 접촉계면에서 경사입사 초음파의 반사.투과 특성분석
Date2012.05.03 CategoryDomestic Views107160 -
Analysis of Transmitted Ultrasound signals through Apples at Different Storage Times using the Continuous Wavelet Transformation
Date2014.03.05 CategoryInternational Views107117 -
A nondestructive method for estimation of the fracture toughness of CrMoV rotor steels based on ultrasonic nonlinearity
Date2012.05.03 CategoryInternational Views107056 -
초음파 비선형 전파특성을 이용한 부분 열화 재료의 평가
Date2012.05.03 CategoryDomestic Views106806 -
The Detection and Imaging of Internal Defect Using ESPI-Based strain Analysis
Date2012.05.03 CategoryInternational Views106785 -
A noncontact NDE method using a laser generated focused-Lamb wave with enhanced defect-detection ability and spation resolution
Date2012.05.03 CategoryInternational Views106746 -
"2.25Cr-1Mo강의 열화도 평가를 위한 비선형 음향효과 응용법"
Date2012.05.03 CategoryDomestic Views106631 -
Nonlinear Ultrasonic Method to Detect Micro-delamination in Electronic Packaging
Date2012.05.03 CategoryInternational Views106428 -
Application of Macrofiber Composite for Smart Transducer of Lamb Wave Inspection
Date2014.03.05 CategoryInternational Views106255 -
Advanced Technologies for Estimation of Nonlinear Ultrasonic Parameter
Date2012.05.03 CategoryInternational Views106238 -
Evaluation of material degrading using nonlinear acoustic effect
Date2012.05.03 CategoryInternational Views105610 -
Slip damage of silicon wafers subjected to continuous infrared laser irradiation
Date2014.09.29 CategoryInternational Views105416 -
자동 초점 기법을 이용한 유리 내부 결함 검출
Date2012.05.03 CategoryDomestic Views105344 -
Detection of Micro-Delamination in Electronic Packaging by Using the Ultrasonic Nonlinearity
Date2012.05.03 CategoryInternational Views105187 -
Application of Nonlinear Ultrasonics to the NDE of Material Degradation
Date2012.05.03 CategoryInternational Views105007 -
NONLINEAR BEHAVIOR OF ULTRASONIC WAVE AT CRACK
Date2012.05.03 CategoryInternational Views104824 -
Estimation of Nonlinear Acoustic Parameter Using Bispectral Analysis
Date2012.05.03 CategoryInternational Views104408 -
Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam
Date2014.03.05 CategoryDomestic Views104335 -
In situ detection of laser-induced slip initiation on the silicon wafer surface
Date2014.09.29 CategoryInternational Views104282 -
Research on the Nondestructive Measurement of Nonlinear Elastic Modulus by using Ultrasonic Wave
Date2012.05.03 CategoryInternational Views104184 -
Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique
Date2015.09.16 CategoryInternational Views104101 -
비선형 응향효과에 의한 고온재료의 파괴인성 열화도 평가
Date2012.05.03 CategoryDomestic Views104097 -
레이저에 의한 집속형 램파의 집속도 향상을 위한 원호형 슬릿 설계
Date2012.05.03 CategoryDomestic Views104080 -
SNR Improvement of AE Signal for Detection of Gas Leak from Tubes under Vibratory Environment
Date2012.05.03 CategoryDomestic Views103113 -
Imaging of Defects in Thin Plate by Scanning of Laser-generated Focused-Lamb Waves
Date2012.05.03 CategoryInternational Views103102 -
IBAD 방법으로 코팅된 PTFE 박막의 마이크로/나노 응착 및 마찰 특성
Date2012.05.03 CategoryDomestic Views102951 -
열처리된 SA508 합금에서의 초음파 비선형성 측정:결정립과 석출물 영향
Date2012.05.03 CategoryDomestic Views102928 -
Application of the laser generated focused-Lamb wave for non-contact imaging of defects in plate
Date2012.05.03 CategoryInternational Views102634 -
The Nonlinearity of Guided Wave in an Elastic Plate
Date2012.05.03 CategoryInternational Views102478 -
IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성
Date2012.05.03 CategoryDomestic Views101924 -
레이저 여기 램파를 이용한 항공기 판재 접합부의 비접촉식 초음파 검사
Date2012.05.03 CategoryDomestic Views101846 -
음탄성법을 이용한 고장력 볼트의 축응력 평가
Date2012.05.03 CategoryDomestic Views101029 -
Detection and Image Processing of Interfacial Micro-delamination in the Thin-layered Structure by Using Nonlinear Ultrasonic Effect
Date2012.05.03 CategoryInternational Views100945 -
선배열 슬릿마스크를 이용한 협대역 레이저 여기 표면파의 음향 비선형성
Date2012.05.03 CategoryDomestic Views100550 -
이미지 좌표계상의 차선모델을 이용한 차선 휨 검출
Date2012.05.03 CategoryDomestic Views100498 -
Relative Measurement of the Acoustic Nonlinearity Parameter using Laser Detection of an Ultrasonic Wave
Date2018.06.14 CategoryInternational Views100213 -
Detection of Lane Curve Direction by using Image Processing Based on Neural Network and Featrure Extraction
Date2012.05.03 CategoryInternational Views99988 -
Reliability Evaluation for Hinge of Folder Devices Using ESPI
Date2012.05.03 CategoryDomestic Views99954 -
Experimental investigation of nonlinear acoustic effect at crack
Date2012.05.03 CategoryInternational Views99558 -
스트레오비전을 이용한 전차선 높이 및 편위 정밀 측정
Date2012.05.03 CategoryDomestic Views99462 -
Finite element analysis of a low-velocity impact test for glass fiber-reinforced polypropylene composites considering mixed-mode interlaminar fracture toughness
Date2018.06.14 CategoryInternational Views99244 -
Estimation of clamping force in high-tension bolts through ultrasonic velocity measurement
Date2012.05.03 CategoryInternational Views98967 -
링배열 펄스레이저 조사에 의한 파장매칭형 배관 유도초음파의 비접촉 발생과 검출
Date2012.05.03 CategoryDomestic Views98569 -
EVALUATION OF FATIGUE DEGRADATION USING NONLINEAR ULTRASONICS
Date2012.05.03 CategoryInternational Views97967 -
High power CW laser-induced damage of CMOS image sensor
Date2015.09.16 CategoryDomestic Views97768 -
Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver
Date2015.09.16 CategoryDomestic Views96832 -
NDE of low-velocity impact damages in composite laminates using ESPI, digital shearography and ultrasound C-scan techniques
Date2014.03.05 CategoryInternational Views96600 -
Study on the Nonlinear Electromagnetic Acoustic Resonance Method for the Evaluation of Hidden Damage in a Metallic Material
Date2015.09.16 CategoryDomestic Views95820 -
Best Poster Award, 3rd International Symposium on Laser Ultrasonics and Advanced Sensing (Sungho Choi)
Date2013.07.02 CategoryAward Views95783 -
Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces
Date2014.03.05 CategoryInternational Views95401 -
Synthetic aperture imaging of contact acoustic nonlinearity to visualize the closing interfaces using tone-burst ultrasonic waves
Date2018.11.28 CategoryInternational Views87901 -
A Method to Estimate the Absolute Ultrasonic Nonlinearity Parameter from Relative Measurements
Date2018.06.14 CategoryInternational Views86822 -
Stress estimation using the acoustoelastic effect of surface waves in weak anisotropic materials
Date2020.01.06 CategoryInternational Views85990 -
2018.11 비파괴학회 우수논문발표상 (김창수,김종범,송동기,장경영)
Date2018.11.29 CategoryAward Views85831 -
비파괴검사학회지 우수 논문상 (김정석, 남태형, 최성호, 장경영)
Date2013.06.19 CategoryAward Views79788 -
한국ITS학회 - 우수논문상
Date2014.09.29 CategoryAward Views77773 -
Dependence of Nonlinear Ultrasonic Characteristic on Second-Phase Precipitation in Heat-Treated Al 6061-T6 alloy
Date2018.11.28 CategoryInternational Views74306 -
비파괴검사학회지 - 우수 논문상
Date2014.09.29 CategoryAward Views71615 -
KSME-SEMES 오픈 이노베이션 챌린지 동상 수상 - 윤성희
Date2016.12.21 CategoryAward Views69549 -
비파괴검사학회지 - 우수논문상
Date2015.09.15 CategoryAward Views67811 -
2015 산업부장관 표창
Date2015.12.08 CategoryAward Views67614 -
2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (석박사통합과정)
Date2016.09.09 CategoryAward Views67090 -
대한기계학회 - 우수 학생 논문상
Date2015.09.16 CategoryAward Views66703 -
Nondestructive Evaluation of Thermal Aging in Al6061 Alloy by measuring Acoustic Nonlinearity of Laser-generated Surface Acoustic Waves
Date2020.01.06 CategoryInternational Views66375 -
JMST - JMST Contribution Award
Date2016.02.23 CategoryAward Views66237 -
Evaluation of yield strength by ultrasonic reconstruction of quadratic nonlinear Stress-Strain curve
Date2021.08.25 CategoryInternational Views66070 -
2016년 비파괴검사학회지 우수논문발표상 (박성현, 김종범, 이주호, 장경영)
Date2017.02.28 CategoryAward Views65777 -
2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)
Date2016.04.09 CategoryAward Views65109 -
2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)
Date2017.03.23 CategoryAward Views64662 -
Variation of Acoustoelastic Effect in Al6061-T6 according to Heat Treatment Time
Date2018.11.28 CategoryDomestic Views62418 -
2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (박사과정)
Date2017.03.23 CategoryAward Views61937 -
2017년 비파괴검사학회지 우수논문발표상 (하홍필, 김종범, 장경영)
Date2018.02.01 CategoryAward Views50057 -
Experimental Verification of Contact Acoustic Nonlinearity at Rough Contact Interfaces
Date2021.08.25 CategoryInternational Views49996 -
Compensation of a Second Harmonic Wave Included in an Incident Ultrasonic Wave for the Precise Measurement of the Acoustic Nonlinearity Parameter
Date2021.08.25 CategoryInternational Views45609 -
Measurement of Absolute Acoustic Nonlinearity Parameter Using Laser-Ultrasonic Detection
Date2021.08.25 CategoryInternational Views43331 -
Ultrasonic nonlinearity parameter in uniaxial stress condition
Date2021.08.25 CategoryInternational Views43122 -
Rapid Molecular Diagnostic Sensor Based on Ball-Lensed Optical Fibers
Date2021.08.25 CategoryInternational Views36486 -
Imaging and Sizing of Surface Defects Using Synthetic Aperture Focusing of Laser-generated Surface Waves
Date2020.01.06 CategoryDomestic Views34939 -
2018.11 비파괴학회 우수포스터상 (이영진,박기태,김종범,김창수,장경영)
Date2018.11.29 CategoryAward Views32365 -
Indirect Method for Measuring Absolute Acoustic Nonlinearity Parameter Using Surface Acoustic Waves with a Fully Non-Contact Laser-Ultrasonic Technique
Date2021.08.25 CategoryInternational Views31739 -
Comparison of Linear and Nonlinear Ultrasonic Parameters in Characterizing Grain Size and Mechanical Properties of 304L Stainless Steel
Date2020.01.06 CategoryInternational Views31011 -
2018 산업통상자원부장관 위촉장
Date2019.06.10 CategoryAward Views29374