In situ detection of laser-induced slip initiation on the silicon wafer surface
http://www.ncbi.nlm.nih.gov/pubmed/25121706
In situ detection of laser-induced slip initiation on the silicon wafer surface.
Abstract
We propose a real-time in situ method to detect slip initiation on the surface of silicon wafers during high-power laser beam irradiation. In this method, light is collected from the surface of a silicon wafer subjected to laser irradiation. When the slip is initiated, it strongly scatters the laser beam, allowing detection of the time of the slip initiation based on the resulting sudden increase in the scattering signal. To demonstrate the performance of this method, a silicon wafer specimen was illuminated by a near-infrared continuous-wave fiber laser beam (of wavelength 1070 nm) at four different laser powers, and the scattered light was detected. The scattering signal increased suddenly at the time of slip initiation. To confirm the occurrence of slip, the surface morphologies of the silicon specimens after laser irradiation were analyzed using an optical microscope; surface slips were observed only in the specimens for which the sudden increase in scattering had been detected. Thus, the proposed method is shown to be very effective for the real-time in situ detection of surface slip initiation induced by high-power laser beam irradiation on silicon wafers.
-
Slip damage of silicon wafers subjected to continuous infrared laser irradiation
-
Detection of Micro-Delamination in Electronic Packaging by Using the Ultrasonic Nonlinearity
-
Application of Nonlinear Ultrasonics to the NDE of Material Degradation
-
NONLINEAR BEHAVIOR OF ULTRASONIC WAVE AT CRACK
-
Estimation of Nonlinear Acoustic Parameter Using Bispectral Analysis
-
In situ detection of laser-induced slip initiation on the silicon wafer surface
-
Research on the Nondestructive Measurement of Nonlinear Elastic Modulus by using Ultrasonic Wave
-
Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique
-
Imaging of Defects in Thin Plate by Scanning of Laser-generated Focused-Lamb Waves
-
Application of the laser generated focused-Lamb wave for non-contact imaging of defects in plate
-
The Nonlinearity of Guided Wave in an Elastic Plate
-
Detection and Image Processing of Interfacial Micro-delamination in the Thin-layered Structure by Using Nonlinear Ultrasonic Effect
-
Relative Measurement of the Acoustic Nonlinearity Parameter using Laser Detection of an Ultrasonic Wave
-
Detection of Lane Curve Direction by using Image Processing Based on Neural Network and Featrure Extraction
-
Experimental investigation of nonlinear acoustic effect at crack
-
Finite element analysis of a low-velocity impact test for glass fiber-reinforced polypropylene composites considering mixed-mode interlaminar fracture toughness
-
Estimation of clamping force in high-tension bolts through ultrasonic velocity measurement
-
EVALUATION OF FATIGUE DEGRADATION USING NONLINEAR ULTRASONICS
-
NDE of low-velocity impact damages in composite laminates using ESPI, digital shearography and ultrasound C-scan techniques
-
Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces