Real-time detection of surface cracks on silicon wafers during laser beam irradiation
http://link.springer.com/article/10.1007/s12206-014-1206-z#page-1
Real-time detection of surface cracks on silicon wafers during laser beam irradiation
Abstract
In this paper, a real-time in situ method to detect surface crack initiation on silicon wafers during laser beam irradiation is proposed. This method collects scattered light from the silicon wafer surface subjected to the laser irradiation. When the crack is initiated, the laser beam is strongly scattered by the crack so that the proposed method can monitor the time of crack initiation based on the increases of the level of the scattering signal. In order to demonstrate the performance of this method, a silicon wafer specimen was illuminated by a continuous wave (CW) fiber laser beam (wavelength of 1,070 nm) and the scattered light was detected at three different laser powers. The scattering signal showed a very high level at the time of crack initiation. The detected crack initiation times were 11.6 s, 5.5 s, and 2.5 s at irradiances of 130 W/cm2, 149 W/cm2, and 168 W/cm2, respectively. These results agree well with the theoretical predictions. Based on these results, we demonstrated that the proposed method is very effective for the real-time in situ detection of surface cracking induced by laser beam irradiation on silicon wafers.
-
Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique
-
Laser ultrasonic inspection in ablation regime
-
Influence of laser beam profiles on the frequency bandwidth of laser-generated surface acoustic waves
-
Study on the Nonlinear Electromagnetic Acoustic Resonance Method for the Evaluation of Hidden Damage in a Metallic Material
-
Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver
-
High power CW laser-induced damage of CMOS image sensor
-
Real-time detection of surface cracks on silicon wafers during laser beam irradiation
-
Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime
-
Non-Contact Evaluation of Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy
-
Relationship between Second- and Third-order Acoustic Nonlinear Parameters in Relative Measurement
-
Non-contact Measurement of Elastic Modulus by using Laser Ultrasonic
-
Relative Measurement of Acoustic Nonlinear Parameters and Comparison of Sensitivity to Thermal Aging
-
Demonstration of Disturbance Propagation and Amplification in Car-Following Situation for Enhancement of Vehicle Platoon System
-
Nanotribological and wetting performance of hierarchical patterns
-
Comparison of Ultrasonic Nonlinear Parameters Measured by PZT and LiNbO3 Transducers
-
Experimental Comparison of Nonlinear Parameters Obtained from Absolute Measurement and Relative Measurement
-
Absolute Measurement and Relative Measurement of Ultrasonic Nonlinear Parameter
-
Assessment of Thermal Aging of Aluminum Alloys by Acoustic Nonlinearity Measurement of Surface Acoustic Waves
-
Assessment of Thermal Degradation by Cumulative Variation of Ultrasonic Nonlinear Parameter
-
Finite element analysis of a low-velocity impact test for glass fiber-reinforced polypropylene composites considering mixed-mode interlaminar fracture toughness