댓글 0조회 수 20393추천 수 0
?

단축키

이전 문서

다음 문서

+ - Up Down Comment Print
?

단축키

이전 문서

다음 문서

+ - Up Down Comment Print

http://link.springer.com/article/10.1007/s12206-014-1206-z#page-1

 

Real-time detection of surface cracks on silicon wafers during laser beam irradiation

  • Sungho Choi
  • , Sung-Hee Yoon
  • , Kyung-Young Jhang 
  • , Wan-Soon Shin

Abstract

In this paper, a real-time in situ method to detect surface crack initiation on silicon wafers during laser beam irradiation is proposed. This method collects scattered light from the silicon wafer surface subjected to the laser irradiation. When the crack is initiated, the laser beam is strongly scattered by the crack so that the proposed method can monitor the time of crack initiation based on the increases of the level of the scattering signal. In order to demonstrate the performance of this method, a silicon wafer specimen was illuminated by a continuous wave (CW) fiber laser beam (wavelength of 1,070 nm) and the scattered light was detected at three different laser powers. The scattering signal showed a very high level at the time of crack initiation. The detected crack initiation times were 11.6 s, 5.5 s, and 2.5 s at irradiances of 130 W/cm2, 149 W/cm2, and 168 W/cm2, respectively. These results agree well with the theoretical predictions. Based on these results, we demonstrated that the proposed method is very effective for the real-time in situ detection of surface cracking induced by laser beam irradiation on silicon wafers.


분류 제목 조회 수
International Assessment of Thermal Degradation by Cumulative Variation of Ultrasonic Nonlinear Parameter     19391
International Assessment of Thermal Aging of Aluminum Alloys by Acoustic Nonlinearity Measurement of Surface Acoustic Waves     18473
International Absolute Measurement and Relative Measurement of Ultrasonic Nonlinear Parameter     19002
International Experimental Comparison of Nonlinear Parameters Obtained from Absolute Measurement and Relative Measurement     17767
International Comparison of Ultrasonic Nonlinear Parameters Measured by PZT and LiNbO3 Transducers     17651
International Nanotribological and wetting performance of hierarchical patterns     19570
International Demonstration of Disturbance Propagation and Amplification in Car-Following Situation for Enhancement of Vehicle Platoon System     20526
International Relative Measurement of Acoustic Nonlinear Parameters and Comparison of Sensitivity to Thermal Aging     20046
International Non-contact Measurement of Elastic Modulus by using Laser Ultrasonic     22188
International Relationship between Second- and Third-order Acoustic Nonlinear Parameters in Relative Measurement     20461
International Non-Contact Evaluation of Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy     19629
International Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime     20670
International Real-time detection of surface cracks on silicon wafers during laser beam irradiation     20393
Domestic High power CW laser-induced damage of CMOS image sensor     20704
Domestic Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver     20695
Domestic Study on the Nonlinear Electromagnetic Acoustic Resonance Method for the Evaluation of Hidden Damage in a Metallic Material     20364
International Influence of laser beam profiles on the frequency bandwidth of laser-generated surface acoustic waves     20338
International Laser ultrasonic inspection in ablation regime     19922
International Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique     20483
International In-Line Ultrasonic Monitoring for Sediments Stuck on Inner Wall of a Polyvinyl Chloride Pipe     27986
Board Pagination ‹ Prev 1 2 3 4 5 6 7 8 Next ›
/ 8
Designed by hikaru100

나눔글꼴 설치 안내


이 PC에는 나눔글꼴이 설치되어 있지 않습니다.

이 사이트를 나눔글꼴로 보기 위해서는
나눔글꼴을 설치해야 합니다.

설치 취소

SketchBook5,스케치북5

SketchBook5,스케치북5

SketchBook5,스케치북5

SketchBook5,스케치북5

ISNDE Laboratory
203-2,Engineering Center Annex
Hanyang University,
222 Wangsimni-ro, Seongdong-gu
Seoul 04763, Korea
04763 서울특별시 성동구 왕십리로 222
한양대학교 공업센터 별관 203-2호
지능계측 및 비파괴평가 연구실
Tel: 02 - 2220 - 4220
Fax: 02 - 2299 - 7207