International
2014.09.29 13:43
Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
댓글 0조회 수 637757추천 수 0
http://opticalengineering.spiedigitallibrary.org/article.aspx?articleid=1813918
Materials, Photonic Devices, And Sensors
Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
Opt. Eng. 53(1), 017103 (Jan 10, 2014). doi:10.1117/1.OE.53.1.017103
History: Received September 6, 2013; Revised November 13, 2013; AcceptedDecember 16, 2013
Abstract. Laser-induced thermal damages of a silicon wafer surface subjected to continuous near-infrared laser irradiation were investigated. Silicon wafer specimens were illuminated by a continuous-wave fiber laser beam (1070-nm wavelength) with irradiances from 93 to 186 W/cm2 , and the surface morphology of each specimen was analyzed using optical microscopy. With increasing irradiance, straight cracks in the <110> direction appeared first, and partial melting and complete melting were subsequently observed. The mechanism of these laser-induced thermal damages in the silicon wafer surface was discussed with numerical analysis based on the heat transfer and thermoelasticity model. The irradiances initiating the cracking and melting were predicted by determining the irradiances in which the calculated thermal stress and temperature exceeded the corresponding limits of the fracture strength and melting point, respectively. These predictions agreed well with the experimental findings. Laser-induced thermal damages of the silicon wafer surface subjected to a continuous near-infrared laser irradiation were identified based on these investigations.
-
Thermal damages on the surface of a silicon wafer induced by a near-infrared laser
Date2014.09.29 CategoryInternational Views637757 -
Analysis of the influence of surface roughness on measurement of ultrasonic nonlinearity parameter using contact-type transducer
Date2021.08.25 CategoryInternational Views505492 -
Absolute Measurement and Relative Measurement of Ultrasonic Nonlinear Parameter
Date2017.01.16 CategoryInternational Views303036 -
Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime
Date2015.09.16 CategoryInternational Views281677 -
Real-time detection of surface cracks on silicon wafers during laser beam irradiation
Date2015.09.16 CategoryInternational Views249508 -
Non-contact Measurement of Elastic Modulus by using Laser Ultrasonic
Date2015.09.16 CategoryInternational Views232315 -
Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique
Date2014.09.29 CategoryDomestic Views222557 -
Assessment of Thermal Degradation by Cumulative Variation of Ultrasonic Nonlinear Parameter
Date2017.01.16 CategoryInternational Views207767 -
Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy (Al-Mg-Si-Cu)
Date2014.03.05 CategoryInternational Views191756 -
Imaging of Harmonic Wave Generated by Contact Acoustic Nonlinearity in Obliquely Incident Ultrasonic Wave
Date2014.03.05 CategoryDomestic Views191473 -
Surface characteristics of aluminum 6061-T6 subjected to Nd:YAG pulsed-laser irradiation
Date2012.06.21 CategoryInternational Views187571 -
Non-contact Single-Mode Guided Wave Technique by the Combination of Wavelength-Matched Laser Generation and Angle-Matched Leak Wave Detection
Date2012.05.03 CategoryInternational Views183059 -
Experimental Comparison of Nonlinear Parameters Obtained from Absolute Measurement and Relative Measurement
Date2017.01.16 CategoryInternational Views168086 -
Finite Difference Method Analysis of Ultrasonic Nonlinearity in Partially Degraded Material
Date2012.05.03 CategoryInternational Views160278 -
Non-Contact Evaluation of Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy
Date2015.09.16 CategoryInternational Views160094 -
Fatigue-induced microdamage characterization of stainless steel 316L using innovative nonlinear acoustics
Date2012.06.21 CategoryInternational Views148258 -
Demonstration of Disturbance Propagation and Amplification in Car-Following Situation for Enhancement of Vehicle Platoon System
Date2015.09.16 CategoryInternational Views147637 -
Single-mode guided wave technique using ring-arrayed laser beam for thin-tube inspection
Date2012.05.03 CategoryInternational Views144415 -
모드선택성을 강화한 비접촉식 유도초음파 기술
Date2012.05.03 CategoryDomestic Views143284 -
Comparison of Ultrasonic Nonlinear Parameters Measured by PZT and LiNbO3 Transducers
Date2017.01.16 CategoryInternational Views140232