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Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam

2012.10

최성호, 김정석, 장경영, 신완순

대한기계학회논문집


분류 제목 조회 수
International Relative Measurement of the Acoustic Nonlinearity Parameter using Laser Detection of an Ultrasonic Wave  fileimage   5562
International A Method to Estimate the Absolute Ultrasonic Nonlinearity Parameter from Relative Measurements  fileimage   5630
International Finite element analysis of a low-velocity impact test for glass fiber-reinforced polypropylene composites considering mixed-mode interlaminar fracture toughness  fileimage   5881
Workshop 제 6차 잠닉손상진단 핵심기술개발 Workshop  fileimage   11254
Workshop 김진연 박사 초청 세미나 "Sensitization in Stainless Steels and Nonlinear Ultrasound"  fileimage   10940
Award 2017년 비파괴검사학회지 우수논문발표상 (하홍필, 김종범, 장경영)  fileimage   10870
Award 2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (박사과정)     25202
Award 2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)     25036
Workshop 제 5차 잠닉손상진단 핵심기술개발 Workshop  fileimage   26262
Award 2016년 비파괴검사학회지 우수논문발표상 (박성현, 김종범, 이주호, 장경영)  fileimage   26719
International Assessment of Thermal Degradation by Cumulative Variation of Ultrasonic Nonlinear Parameter     43458
International Assessment of Thermal Aging of Aluminum Alloys by Acoustic Nonlinearity Measurement of Surface Acoustic Waves     40705
International Absolute Measurement and Relative Measurement of Ultrasonic Nonlinear Parameter     41166
International Experimental Comparison of Nonlinear Parameters Obtained from Absolute Measurement and Relative Measurement     39567
International Comparison of Ultrasonic Nonlinear Parameters Measured by PZT and LiNbO3 Transducers     40558
Award KSME-SEMES 오픈 이노베이션 챌린지 동상 수상 - 윤성희  fileimage   28557
Award 2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (석박사통합과정)  fileimage   28664
Award 2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)     27593
Domestic Effect of Window Function to Measurement of Ultrasonic Nonlinear Parameter using Fast Fourier Transform of Tone-burst Signal     31800
Award JMST - JMST Contribution Award  fileimage   28596
Workshop Yoshikazu Ohara 교수 초청 세미나  fileimage   27705
Workshop Takahiro Hayashi 교수 초청 세미나  fileimage   27632
International Nanotribological and wetting performance of hierarchical patterns     41285
Workshop 제 4차 잠닉손상 진단 핵심기술개발 Workshop  fileimage   28801
Award 2015 산업부장관 표창  fileimage   29070
Workshop 제3차 잠닉손상 진단 핵심기술개발 Workshop  fileimage   27834
Workshop 김진연 박사 초청 세미나 "Advanced Ultrasonic Testingbased on Acoustic Nonlinearity Measurement for NDE"  fileimage   29845
Workshop 제2차 잠닉손상 진단 핵심기술개발 Workshop  fileimage   27013
Workshop 2차년도 잠닉손상진단 핵심기술개발 1세부과제 진행 회의  fileimage   29158
Workshop 잠닉손상 진단 핵심기술개발 2차년도 kick-off Meeting  fileimage   28546
Workshop The Workshop on Current & Future of Nonlninear Ultrasonic Techniques for NDE  fileimage   27225
Workshop The Pre-workshop on Current and Future of Nonlinear Ultrasonic Techniques for NDE  fileimage   28294
Workshop 잠닉손상 진단 핵심원천기술 개발 연구 Workshop  fileimage   28205
Workshop 잠닉손상 진단 핵심원천기술 개발 – 1세부 진도회의  fileimage   28739
Workshop 잠닉손상 진단 핵심원천기술 개발 Kick-off Meeting  fileimage   27714
Workshop Ultrasonic & Electromagnetic Waves for NDE and SHM  fileimage   28612
International Demonstration of Disturbance Propagation and Amplification in Car-Following Situation for Enhancement of Vehicle Platoon System     43674
International Relative Measurement of Acoustic Nonlinear Parameters and Comparison of Sensitivity to Thermal Aging     42766
International Non-contact Measurement of Elastic Modulus by using Laser Ultrasonic     45342
International Relationship between Second- and Third-order Acoustic Nonlinear Parameters in Relative Measurement     41633
International Non-Contact Evaluation of Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy     41950
International Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime     42857
International Real-time detection of surface cracks on silicon wafers during laser beam irradiation     42481
Domestic High power CW laser-induced damage of CMOS image sensor     43120
Domestic Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver     44094
Domestic Study on the Nonlinear Electromagnetic Acoustic Resonance Method for the Evaluation of Hidden Damage in a Metallic Material     42425
International Influence of laser beam profiles on the frequency bandwidth of laser-generated surface acoustic waves     44158
International Laser ultrasonic inspection in ablation regime     42470
International Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique     42765
Award 대한기계학회 - 우수 학생 논문상  fileimage   28800
Award 비파괴검사학회지 - 우수논문상  fileimage   27738
Award 한국도로공사 교통데이터 공모전 - 대한교통학회 회장상 수상 (김진수)  fileimage   56717
International In-Line Ultrasonic Monitoring for Sediments Stuck on Inner Wall of a Polyvinyl Chloride Pipe     50228
International In situ detection of laser-induced slip initiation on the silicon wafer surface     49837
International Initiation time of near-infrared laser-induced slip on the surface of silicon wafers     48614
Domestic Evaluation of Ultrasonic Nonlinear Characteristics in Artificially Aged Al6061-T6     49282
Domestic Simulations for Internal Defect Inspection using Laser Generated Ultrasonic Wave in Ablation Regime     49403
International Slip damage of silicon wafers subjected to continuous infrared laser irradiation     48743
International Thermal damages on the surface of a silicon wafer induced by a near-infrared laser     48899
Domestic Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique     48720
Domestic Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile Models     48953
Domestic Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy     49063
Domestic A6061 합금의 석출경화 열처리에 따른 탄성파의 음향 특성 연구     52161
Award 비파괴검사학회지 - 우수 논문상  fileimage   34397
Award 한국ITS학회 - 우수논문상  fileimage   38698
International Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave     52493
International Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy (Al-Mg-Si-Cu)     116540
International Application of Macrofiber Composite for Smart Transducer of Lamb Wave Inspection     53537
Domestic Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam     54371
International Imaging of contact acoustic nonlinearity using synthetic aperture technique     53141
Domestic Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique     56275
Domestic Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile     55643
Domestic Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy     55022
International Influence of slit width on harmonic generation in ultrasonic surface waves excited by masking a laser beam with a line arrayed slit     52164
International Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy     52519
International Analysis of Transmitted Ultrasound signals through Apples at Different Storage Times using the Continuous Wavelet Transformation     51610
Domestic Fully Non-Contact Assessment of Acoustic Nonlinearity According to Plastic Deformation in Al6061 Alloy     54613
Domestic Imaging of Harmonic Wave Generated by Contact Acoustic Nonlinearity in Obliquely Incident Ultrasonic Wave     53900
Domestic Frequency Characteristics of Surface Wave Generated by Single-Line Pulsed Laser Beam with Two Kinds of Spatial Energy Profile Models: Gaussian and Square-Like     54367
International Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces     50774
International NDE of low-velocity impact damages in composite laminates using ESPI, digital shearography and ultrasound C-scan techniques     49771
Award Best Poster Award, 3rd International Symposium on Laser Ultrasonics and Advanced Sensing (Sungho Choi)     46398
Award Best Student Poster Presentation Award: FIRST PRIZE, 9th FEOFS (Sung-ho Choi)  fileimage   55827
Award 2013 글로벌박사펠로우십 신규 사업 2 건 최종 선정 (박사과정 김진수, 석박통합과정 서호건)     75850
Award 비파괴검사학회지 우수 논문상 (김정석, 남태형, 최성호, 장경영)  fileimage   39899
Workshop 2012 첨단 비파괴 진단 기술 워크샵, 제주도  fileimage   40854
Domestic B-mode Imaging of second Harmonic Amplitude induced by CAN at Contact Interface  file   94503
International Surface characteristics of aluminum 6061-T6 subjected to Nd:YAG pulsed-laser irradiation     64383
International Fatigue-induced microdamage characterization of stainless steel 316L using innovative nonlinear acoustics     61913
International Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces     64462
International Ultrasonic Characterization for directional coarsening in nickel-base superalloy during creep exposure     63729
International Frequency Response of Narrowband Surface Waves Generated by Laser Beams Spatially Modulated with a Line-arrayed Slit Mask     61916
International "Acoustic Nonlinearity of Surface Wave in a Fatigued Aluminum Alloy Specimen "     64309
International Nonliner Ultrasonic Characterization of fatigue damage in sus316L alloy     61522
International Wetting behavior and nanotribological properties of silicon nanopatterns combined with diamond-like carbon and perfluoropolyther films     61769
International " Bending Fatigue Evaluation of Al6061 Alloy by Laser-generated Surface Wave"     63141
International CREEP CHARACTERIZATION OF SUPERALLOY IN-738 USING ULTRASONICC NONLINEARITY MEASUREMENT     61561
International Acoustic Nonlinearity of Narrowband Lager-generated Surface Waves in the Bending Fatigue of Al6061 alloy.     61448
International CHARACTERIZATION OF TAINLESS STEEL FIBER REINFORCED ALUMINUM COMPOSITE USING ULTRASONIC NONLINEARITY     59335
International EVALUATION OF FATIGUE DEGRADATION USING NONLINEAR ULTRASONICS     53629
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ISNDE Laboratory
203-2,Engineering Center Annex
Hanyang University,
222 Wangsimni-ro, Seongdong-gu
Seoul 04763, Korea
04763 서울특별시 성동구 왕십리로 222
한양대학교 공업센터 별관 203-2호
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