댓글 0조회 수 70546추천 수 0
?

단축키

이전 문서

다음 문서

+ - Up Down Comment Print
?

단축키

이전 문서

다음 문서

+ - Up Down Comment Print

http://link.springer.com/article/10.1007/s12206-014-1206-z#page-1

 

Real-time detection of surface cracks on silicon wafers during laser beam irradiation

  • Sungho Choi
  • , Sung-Hee Yoon
  • , Kyung-Young Jhang 
  • , Wan-Soon Shin

Abstract

In this paper, a real-time in situ method to detect surface crack initiation on silicon wafers during laser beam irradiation is proposed. This method collects scattered light from the silicon wafer surface subjected to the laser irradiation. When the crack is initiated, the laser beam is strongly scattered by the crack so that the proposed method can monitor the time of crack initiation based on the increases of the level of the scattering signal. In order to demonstrate the performance of this method, a silicon wafer specimen was illuminated by a continuous wave (CW) fiber laser beam (wavelength of 1,070 nm) and the scattered light was detected at three different laser powers. The scattering signal showed a very high level at the time of crack initiation. The detected crack initiation times were 11.6 s, 5.5 s, and 2.5 s at irradiances of 130 W/cm2, 149 W/cm2, and 168 W/cm2, respectively. These results agree well with the theoretical predictions. Based on these results, we demonstrated that the proposed method is very effective for the real-time in situ detection of surface cracking induced by laser beam irradiation on silicon wafers.


분류 제목 조회 수
Award 2019.11 한국비파괴검사학회 2019 추계학술대회 우수논문발표상 (박성현, 홍정연, 최성호, 장경영)     858
Award 2019.07 한국비파괴검사학회 2019 춘계학술대회 우수논문발표상 (송동기, 류주영, 홍정연, 최성호, 장경영)     896
Award 2019.07 한국비파괴검사학회 2019 춘계학술대회 우수논문발표상 (박성현, 심명종, 최성호, 장경영)     848
International Nondestructive Evaluation of Thermal Aging in Al6061 Alloy by measuring Acoustic Nonlinearity of Laser-generated Surface Acoustic Waves     1008
International Stress estimation using the acoustoelastic effect of surface waves in weak anisotropic materials     1020
International Comparison of Linear and Nonlinear Ultrasonic Parameters in Characterizing Grain Size and Mechanical Properties of 304L Stainless Steel     1010
Domestic Imaging and Sizing of Surface Defects Using Synthetic Aperture Focusing of Laser-generated Surface Waves     1085
Award 2018 산업통상자원부장관 위촉장  fileimage   8879
Award 2018.11 비파괴학회 우수포스터상 (이영진,박기태,김종범,김창수,장경영)     14676
Award 2018.11 비파괴학회 우수논문발표상 (김창수,김종범,송동기,장경영)     14696
International Internal defect detection using laser-generated longitudinal waves in ablation regime     20710
International Synthetic aperture imaging of contact acoustic nonlinearity to visualize the closing interfaces using tone-burst ultrasonic waves     22915
Domestic Variation of Acoustoelastic Effect in Al6061-T6 according to Heat Treatment Time     21796
International Dependence of Nonlinear Ultrasonic Characteristic on Second-Phase Precipitation in Heat-Treated Al 6061-T6 alloy     21715
International Relative Measurement of the Acoustic Nonlinearity Parameter using Laser Detection of an Ultrasonic Wave  fileimage   31526
International A Method to Estimate the Absolute Ultrasonic Nonlinearity Parameter from Relative Measurements  fileimage   32522
International Finite element analysis of a low-velocity impact test for glass fiber-reinforced polypropylene composites considering mixed-mode interlaminar fracture toughness  fileimage   32513
Workshop 제 6차 잠닉손상진단 핵심기술개발 Workshop  fileimage   31538
Workshop 김진연 박사 초청 세미나 "Sensitization in Stainless Steels and Nonlinear Ultrasound"  fileimage   32041
Award 2017년 비파괴검사학회지 우수논문발표상 (하홍필, 김종범, 장경영)  fileimage   30058
Award 2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (박사과정)     44103
Award 2017 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)     43787
Workshop 제 5차 잠닉손상진단 핵심기술개발 Workshop  fileimage   47181
Award 2016년 비파괴검사학회지 우수논문발표상 (박성현, 김종범, 이주호, 장경영)  fileimage   47201
International Assessment of Thermal Degradation by Cumulative Variation of Ultrasonic Nonlinear Parameter     72170
International Assessment of Thermal Aging of Aluminum Alloys by Acoustic Nonlinearity Measurement of Surface Acoustic Waves     69027
International Absolute Measurement and Relative Measurement of Ultrasonic Nonlinear Parameter     69477
International Experimental Comparison of Nonlinear Parameters Obtained from Absolute Measurement and Relative Measurement     68341
International Comparison of Ultrasonic Nonlinear Parameters Measured by PZT and LiNbO3 Transducers     68827
Award KSME-SEMES 오픈 이노베이션 챌린지 동상 수상 - 윤성희  fileimage   48369
Award 2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 전지현 (석박사통합과정)  fileimage   47967
Award 2016 글로벌박사 펠로우십 (Global Ph.D. Fellowship) 1건 선정 - 서호건 (박사과정)     45951
Award JMST - JMST Contribution Award  fileimage   47557
Workshop Yoshikazu Ohara 교수 초청 세미나  fileimage   47649
Workshop Takahiro Hayashi 교수 초청 세미나  fileimage   47608
International Nanotribological and wetting performance of hierarchical patterns     69124
Workshop 제 4차 잠닉손상 진단 핵심기술개발 Workshop  fileimage   48997
Award 2015 산업부장관 표창  fileimage   48643
Workshop 제3차 잠닉손상 진단 핵심기술개발 Workshop  fileimage   48014
Workshop 김진연 박사 초청 세미나 "Advanced Ultrasonic Testingbased on Acoustic Nonlinearity Measurement for NDE"  fileimage   49798
Workshop 제2차 잠닉손상 진단 핵심기술개발 Workshop  fileimage   46718
Workshop 2차년도 잠닉손상진단 핵심기술개발 1세부과제 진행 회의  fileimage   49318
Workshop 잠닉손상 진단 핵심기술개발 2차년도 kick-off Meeting  fileimage   49003
Workshop The Workshop on Current & Future of Nonlninear Ultrasonic Techniques for NDE  fileimage   47321
Workshop The Pre-workshop on Current and Future of Nonlinear Ultrasonic Techniques for NDE  fileimage   48293
Workshop 잠닉손상 진단 핵심원천기술 개발 연구 Workshop  fileimage   48351
Workshop 잠닉손상 진단 핵심원천기술 개발 – 1세부 진도회의  fileimage   48996
Workshop 잠닉손상 진단 핵심원천기술 개발 Kick-off Meeting  fileimage   47826
Workshop Ultrasonic & Electromagnetic Waves for NDE and SHM  fileimage   48647
International Demonstration of Disturbance Propagation and Amplification in Car-Following Situation for Enhancement of Vehicle Platoon System     71807
International Relative Measurement of Acoustic Nonlinear Parameters and Comparison of Sensitivity to Thermal Aging     71057
International Non-contact Measurement of Elastic Modulus by using Laser Ultrasonic     73305
International Relationship between Second- and Third-order Acoustic Nonlinear Parameters in Relative Measurement     69570
International Non-Contact Evaluation of Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy     69762
International Influence of repetitive pulsed laser irradiation on the surface characteristics of an aluminum alloy in the melting regime     70850
International Real-time detection of surface cracks on silicon wafers during laser beam irradiation     70546
Domestic High power CW laser-induced damage of CMOS image sensor     70739
Domestic Measurement of Ultrasonic Nonlinear Parameter by Using Non-Contact Ultrasonic Receiver     71618
Domestic Study on the Nonlinear Electromagnetic Acoustic Resonance Method for the Evaluation of Hidden Damage in a Metallic Material     69859
International Influence of laser beam profiles on the frequency bandwidth of laser-generated surface acoustic waves     75246
International Laser ultrasonic inspection in ablation regime     69101
International Improvement of Crack Sizing Performance by using Nonlinear Ultrasonic Technique     70660
Award 대한기계학회 - 우수 학생 논문상  fileimage   48632
Award 비파괴검사학회지 - 우수논문상  fileimage   47173
Award 한국도로공사 교통데이터 공모전 - 대한교통학회 회장상 수상 (김진수)  fileimage   83516
International In-Line Ultrasonic Monitoring for Sediments Stuck on Inner Wall of a Polyvinyl Chloride Pipe     76746
International In situ detection of laser-induced slip initiation on the silicon wafer surface     74982
International Initiation time of near-infrared laser-induced slip on the surface of silicon wafers     73321
Domestic Evaluation of Ultrasonic Nonlinear Characteristics in Artificially Aged Al6061-T6     75640
Domestic Simulations for Internal Defect Inspection using Laser Generated Ultrasonic Wave in Ablation Regime     74986
International Slip damage of silicon wafers subjected to continuous infrared laser irradiation     74275
International Thermal damages on the surface of a silicon wafer induced by a near-infrared laser     74177
Domestic Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique     75970
Domestic Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile Models     75830
Domestic Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy     75729
Domestic A6061 합금의 석출경화 열처리에 따른 탄성파의 음향 특성 연구     78757
Award 비파괴검사학회지 - 우수 논문상  fileimage   53466
Award 한국ITS학회 - 우수논문상  fileimage   58771
International Crack Detection in Single-Crystalline Silicon Wafer Using Laser Generated Lamb Wave     76497
International Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy (Al-Mg-Si-Cu)     142611
International Application of Macrofiber Composite for Smart Transducer of Lamb Wave Inspection     78612
Domestic Thermal Damage Characterization of Silicon Wafer Subjected to CW Laser Beam     81111
International Imaging of contact acoustic nonlinearity using synthetic aperture technique     77382
Domestic Feasibility of MFC (Macro-Fiber Composite) Transducers for Guided Wave Technique     85594
Domestic Initial Second Harmonic Generation in Narrowband Surface Waves by Multi-Line Laser Beams for Two Kinds of Spatial Energy Profile     83203
Domestic Evaluation of Ultrasonic Nonlinear Characteristics in Heat-Treated Aluminum Alloy     82337
International Influence of slit width on harmonic generation in ultrasonic surface waves excited by masking a laser beam with a line arrayed slit     76302
International Acoustic Nonlinearity of a Laser-Generated Surface Wave in a Plastically Deformed Aluminum Alloy     77844
International Analysis of Transmitted Ultrasound signals through Apples at Different Storage Times using the Continuous Wavelet Transformation     76266
Domestic Fully Non-Contact Assessment of Acoustic Nonlinearity According to Plastic Deformation in Al6061 Alloy     80385
Domestic Imaging of Harmonic Wave Generated by Contact Acoustic Nonlinearity in Obliquely Incident Ultrasonic Wave     80119
Domestic Frequency Characteristics of Surface Wave Generated by Single-Line Pulsed Laser Beam with Two Kinds of Spatial Energy Profile Models: Gaussian and Square-Like     82481
International Harmonic generation of an obliquely incident ultrasonic wave in solid-solid contact interfaces     74447
International NDE of low-velocity impact damages in composite laminates using ESPI, digital shearography and ultrasound C-scan techniques     73272
Award Best Poster Award, 3rd International Symposium on Laser Ultrasonics and Advanced Sensing (Sungho Choi)     67866
Award Best Student Poster Presentation Award: FIRST PRIZE, 9th FEOFS (Sung-ho Choi)  fileimage   79937
Award 2013 글로벌박사펠로우십 신규 사업 2 건 최종 선정 (박사과정 김진수, 석박통합과정 서호건)     102884
Award 비파괴검사학회지 우수 논문상 (김정석, 남태형, 최성호, 장경영)  fileimage   59040
Workshop 2012 첨단 비파괴 진단 기술 워크샵, 제주도  fileimage   60956
Domestic B-mode Imaging of second Harmonic Amplitude induced by CAN at Contact Interface  file   124137
Board Pagination ‹ Prev 1 2 3 Next ›
/ 3
Designed by hikaru100

나눔글꼴 설치 안내


이 PC에는 나눔글꼴이 설치되어 있지 않습니다.

이 사이트를 나눔글꼴로 보기 위해서는
나눔글꼴을 설치해야 합니다.

설치 취소

SketchBook5,스케치북5

SketchBook5,스케치북5

SketchBook5,스케치북5

SketchBook5,스케치북5

ISNDE Laboratory
203-2,Engineering Center Annex
Hanyang University,
222 Wangsimni-ro, Seongdong-gu
Seoul 04763, Korea
04763 서울특별시 성동구 왕십리로 222
한양대학교 공업센터 별관 203-2호
지능계측 및 비파괴평가 연구실
Tel: 02 - 2220 - 4220
Fax: 02 - 2299 - 7207